ERS Rotary Vacuum Actuator
Highly integrates a rotary platform with a vacuum suction cup and a built-in pneumatic slip ring, keeping the vacuum circuit continuous during rotation. Ideal for applications requiring rotary alignment, turning or flipping after pickup—such as wafer alignment, screen lamination and label transfer.
The Vacuum Handling Solution for Rotary Alignment
The ERS rotary vacuum actuator combines a high-precision rotary platform with an integrated vacuum circuit. The vacuum channel runs through a precision pneumatic slip ring from the center of the rotary axis, maintaining stable vacuum without interruption during unlimited 360° rotation. The rotary side uses a high-precision direct-drive motor or harmonic reducer for high accuracy and speed.
The actuator features a vacuum-generator interface for external or integrated vacuum generation and supports various suction-cup mounts to match the workpiece. It is widely used in semiconductor wafer rotary alignment, 3C screen lamination turning, label rotary transfer, and optical element adjustment—where vacuum handling meets rotary alignment.
Core Product Advantages
Unlimited Rotation
Unlimited 360° continuous rotation; a pneumatic slip ring keeps the vacuum circuit connected without interruption.
High-Precision Rotation
Direct-drive/harmonic transmission with up to ±0.005° rotary repeatability for precision alignment.
Integrated Air Circuit
The vacuum circuit runs through the shaft center—no external cable-chain tubing, a clean design with no tangled lines.
Standard Interface
A standard suction-cup mount accepts vacuum cups and nozzles of various sizes.
Vacuum Monitoring
An optional vacuum pressure sensor monitors vacuum level in real time to confirm part pickup.
Easy Installation
An integrated, compact design mounts directly at the machine end, simplifying the mechanical structure.
Specifications
| Parameter | ERS-05 | ERS-20 |
| Rotary Angle | 360° Unlimited | |
| Rotary Repeatability | ±0.005° | ±0.01° |
| Rated Torque | 0.2N·m | 1N·m |
| Max Load | 0.5kg | 2kg |
| Air Port | M5 | |
| Vacuum Port Position | Shaft Center | |
| Communication Protocol | Modbus/EtherCAT | |
Typical Applications
Semiconductor
Wafer rotary alignment
3C Electronics
Screen lamination turning
Label Transfer
Rotary label application
Optical Adjustment
Rotary adjustment of optical elements
More Related Products
Get Your Rotary Vacuum Solution
Continuous vacuum during rotation for precise aligned pickup